适用于恶劣环境的SOI多向热电流量传感器

2015 International Semiconductor Conference (CAS) Pub Date : 2015-10-01 DOI:10.1109/SMICND.2015.7355173

A. De Luca, G. Longobardi, F. Udrea

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引用次数: 9

摘要

本文提出了一种新型的SOI CMOS多向热电流量传感器。据作者所知，该传感器首次被证明能够应对恶劣的环境条件，例如150°C的环境温度和高达75%的湿度。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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SOI multidirectional thermoelectric flow sensor for harsh environment applications

In this paper we present a novel SOI CMOS multidirectional thermoelectric flow sensor. For the first time to the best knowledge of the authors, the sensor is shown to be able to cope with harsh environment conditions, such as 150 °C ambient temperature and humidity up to 75%.

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2015 International Semiconductor Conference (CAS)

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