高速下叠翅In0.53Ga0.47As FinFET标准电池性能分析

Jay Pathak, A. Darji
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引用次数: 0

摘要

在当前的CMOS技术中,在sub- 14nm技术节点上使用In0.53Ga0.47As finfet因其卓越的电性能而成为一种有前途的选择。提出了利用In0.53Ga0.47As nfinfet改进FinFET标准单元的方法,为占用各种标准单元的高级VLSI数字系统流提供了一个平台。栅极-源极-漏极(G-S/D)搭接翅片长度(Lun)结构在很长一段时间内有效地减小了短通道效应。本研究在In0.53Ga0.47As nfinfet中实现了不同的标准单元,以了解其意义。通过改变工艺变化对翅片高度、栅极氧化物厚度和通道长度偏移参数的影响,测试了器件的可靠性。采用Lun= 3 nm方法在不同标准电池上进行仿真,结果表明最小延迟为42.26%。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Analysis of Standard Cells performance for In0.53Ga0.47As FinFET with underlap fin length for High Speed Applications
In current CMOS technology for high-speed applications at the sub-14 nm technology node using In0.53Ga0.47As FinFETs is becoming a promising choice because of its exceptional electrical properties. The approach of improving FinFET standard cells utilizing In0.53Ga0.47As nFinFETs is suggested to offer a platform in advanced VLSI digital system flow occupying various standard cells. Gate-source/drain (G-S/D) underlap fin length (Lun) structures are effectively used to reduce the short channel effects for a long time. In this work, the implementation of various standard cells with different Lun in In0.53Ga0.47As nFinFETs to understand its significance. The device reliability was tested in the proposed work by varying the process variation on the height of fin, gate oxide thickness, and channel length offset parameter. Simulation results performed on the different standard cells with Lun= 3 nm method indicate the minimum delay by 42.26%.
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