外延横向过度生长GaN中光学特性的生长方向依赖性

S. Srinivasan, L. Geng, L. Shi, F. Ponce, F. Bertram, J. Christen, Y. Narukawa, S. Tanaka
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引用次数: 0

摘要

我们已经将外延横向生长的GaN的发光研究与微观结构和局部载流子浓度测量相关联。我们发现相干生长区域的发光特性与侧壁刻面的发光特性有很大的不同。我们发现这些差异与生长前沿有关,而与位错密度无关。这种差异似乎是由于不同方面的Ga空位结合的变化。采用金属有机化学气相沉积法生长ELO GaN (ELOG)结构,沿(1100)方向呈SiO/sub - 2/ mask平行条纹模式。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Growth-direction dependence of optical properties in epitaxially laterally overgrown GaN
We have correlated luminescence studies of epitaxially laterally overgrown GaN with microstructure and local carrier concentration measurements. We have found that the luminescence characteristics of the coherently grown regions are considerably different from those of the sidewall facets. We find that these differences are related to the growth-front and not the dislocation density. The differences appears to be due to a variation in the incorporation of Ga vacancies for different facets. The ELO GaN (ELOG) structures were grown using metalorganic chemical vapor deposition, with a parallel stripe pattern of SiO/sub 2/ mask along (1100) direction.
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