用于倒装芯片组装应用的镓合金互连

D. Baldwin, R. Deshmukh, C. S. Hau
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引用次数: 19

摘要

对于微型互连应用,基于镓合金的创新材料系统为常用的粘合材料(如焊料和导电粘合剂)提供了潜在的有吸引力的替代品,而没有可靠性和环境缺点。镓合金是液态金属和金属粉末的机械合金混合物,在室温下形成,固化形成固体金属间互连。通过这项工作的过程中,镓合金已研究倒装芯片互连的应用。具体来说,本文提出了一项初步可行性研究的结果,证明了镓合金在层状互连材料上作为倒装芯片的适用性。涵盖的主题包括测试车辆装配过程,可靠性筛选结果,初步失效模式分析和互连微观结构分析。为了证明初步的可行性和应用,将铜镍合金镓作为裸硅芯片与印刷电路板之间的微型互连。初步研究表明,这种连接是可行的,可靠性试验表明,在存在下填土材料的情况下,这种连接具有足够的循环疲劳可靠性。此外,在这项工作的过程中,利用现有的工业基础设施,开发了一种新的镓合金微点胶技术。这项初步研究代表了微电子互连材料的重大进步,揭示了创新无铅互连替代方案的潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Gallium alloy interconnects for flip-chip assembly applications
For miniature interconnection applications, innovative material systems based on gallium alloys offer potentially attractive alternatives over commonly used bonding materials, such as solders and conductive adhesives, without the reliability and environmental drawbacks. Gallium alloys are mechanically alloyed mixtures of a liquid metal and metallic powders, formed at room temperature which cure to form solid intermetallic interconnects. Through the course of this work, gallium alloys have been investigated for flip-chip interconnect applications. Specifically, this paper presents the results of a preliminary feasibility study demonstrating the applicability of gallium alloys as flip-chip on laminate interconnect materials. The topics covered include the test vehicle assembly process, reliability screening results, preliminary failure mode analysis, and interconnect microstructure analysis. To demonstrate preliminary feasibility and application, gallium alloyed with copper and nickel was used as micro-miniature interconnects between bare silicon chips and printed circuit boards. This initial study shows feasibility of such interconnects and the reliability tests demonstrate sufficient cyclic fatigue reliability in the presence of underfill material. Moreover, through the course of this work a new micro-dispensing technology for gallium alloys was developed which leverages existing industry infrastructure. This initial study represents a significant advancement in microelectronic interconnect materials unveiling the potential for an innovative lead-free interconnect alternative.
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