Chenglu Lin, Lianjun Wang, Shiyang Zhu, Ping Liu, P. Hemment, S. Zou
{"title":"SIMOX材料上Ti、Co和Fe硅化物的研究","authors":"Chenglu Lin, Lianjun Wang, Shiyang Zhu, Ping Liu, P. Hemment, S. Zou","doi":"10.1109/ICSICT.1995.500077","DOIUrl":null,"url":null,"abstract":"The fabrication of Ti, Co and Fe silicides on SIMOX materials has been investigated. These multilayer structures have been synthesized by different methods respectively. The physical properties and microstructure have been investigated. The experimental results show that TiSi/sub 2/ with a low sheet resistance of 4.5/spl Omega///spl square/, can be formed on the thin film SIMOX. An epitaxial CoSi/sub 2/ film has been obtained on SIMOX by a solid phase reaction of Co/Ti with Si overlayer of SIMOX. Semiconducting /spl beta/-FeSi/sub 2/ film has been synthesized on SIMOX by solid phase epitaxy.","PeriodicalId":286176,"journal":{"name":"Proceedings of 4th International Conference on Solid-State and IC Technology","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1995-10-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Investigation of Ti, Co and Fe silicides on SIMOX materials\",\"authors\":\"Chenglu Lin, Lianjun Wang, Shiyang Zhu, Ping Liu, P. Hemment, S. Zou\",\"doi\":\"10.1109/ICSICT.1995.500077\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The fabrication of Ti, Co and Fe silicides on SIMOX materials has been investigated. These multilayer structures have been synthesized by different methods respectively. The physical properties and microstructure have been investigated. The experimental results show that TiSi/sub 2/ with a low sheet resistance of 4.5/spl Omega///spl square/, can be formed on the thin film SIMOX. An epitaxial CoSi/sub 2/ film has been obtained on SIMOX by a solid phase reaction of Co/Ti with Si overlayer of SIMOX. Semiconducting /spl beta/-FeSi/sub 2/ film has been synthesized on SIMOX by solid phase epitaxy.\",\"PeriodicalId\":286176,\"journal\":{\"name\":\"Proceedings of 4th International Conference on Solid-State and IC Technology\",\"volume\":\"4 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1995-10-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of 4th International Conference on Solid-State and IC Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSICT.1995.500077\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 4th International Conference on Solid-State and IC Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSICT.1995.500077","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Investigation of Ti, Co and Fe silicides on SIMOX materials
The fabrication of Ti, Co and Fe silicides on SIMOX materials has been investigated. These multilayer structures have been synthesized by different methods respectively. The physical properties and microstructure have been investigated. The experimental results show that TiSi/sub 2/ with a low sheet resistance of 4.5/spl Omega///spl square/, can be formed on the thin film SIMOX. An epitaxial CoSi/sub 2/ film has been obtained on SIMOX by a solid phase reaction of Co/Ti with Si overlayer of SIMOX. Semiconducting /spl beta/-FeSi/sub 2/ film has been synthesized on SIMOX by solid phase epitaxy.
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