基于热载子效应的N-MOS晶体管寿命预测研究

I. Ahmad, Z. Kornain, M. Idros
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引用次数: 4

摘要

本研究利用Agilent 4070系列设备和xHCI软件,在晶圆级通过应力分析和工艺分析来确定NMOS晶体管的可靠性和寿命预测技术。应力过程采用直流应力法,分析过程采用Takeda模型和Hu模型。实验结果以图形形式呈现,取决于分析方法,可参考Takeda模型和Hu模型。Takeda模型预测的最小寿命为860小时,而Hu模型预测的最小寿命为790小时。Takeda模型和Hu模型之间的差异仅为8%左右,这使得Takeda和Hu模型都可以用于NMOS晶体管的寿命预测。结论是,根据该寿命预测图,晶体管的任何工作电压都可以预测寿命。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Study of Lifetime Prediction of N-MOS Transistor Due to Hot Carrier Effect
This study discusses a technique to define the reliability and predict the lifetime of NMOS transistor through stressing and analyzing process by using Agilent 4070 Series equipment and xHCI software at wafer level. The stressing process uses direct current stressing method while Takeda and Hu models are used in analysis process. The result of the experiment is in the graph form and it depends on the analysis method which is can be referred to both Takeda and Hu models. The minimum lifetime prediction was 860 hours by using Takeda model as compared to 790 hours using Hu model. The different result between Takeda and Hu model was about 8% only and this allowed both Takeda and Hu models to be used in lifetime prediction of NMOS transistor. For the conclusion, by referring to this lifetime prediction graph, any operating voltage of transistor can predict the lifetime.
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