A. Corigliano, M. Bagherinia, M. Bruggi, S. Mariani, E. Lasalandra
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Optimal design of a resonating MEMS magnetometer: A multi-physics approach
A multi-physics model for a beam subject to current flow in a magnetic field is proposed which takes into account thermal and non-linear geometrical effects. The model is applied to the study of a Lorentz-force MEMS magnetometer. A topology optimization algorithm in which geometrical parameters of the beam subject to Lorentz force are considered optimization variables is proposed and discussed.
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