产量影响评价的实时暗场尺寸测量方法

Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130) Pub Date : 2000-09-26 DOI:10.1109/ISSM.2000.993668

K. Watanabe, H. Nishiyama, M. Noguchi, D. Fujiki, K. Nemoto

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引用次数: 0

摘要

一种实用的在线粒度测量方法被称为实时暗场粒度测量。采用高灵敏度暗场激光扫描检测工具，获得了具有良好相关系数(R/sup 2/=0.7)的尺寸测量数据。因此，即使使用高灵敏度的暗场激光扫描检测工具，也可以正确评估成品率的影响。

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Real-time dark field size measurement method for yield impact evaluation

A practical method for in-line particle size measurement called real-time dark field size measurement has been developed. Size measurement data possessing a good correlation coefficient (R/sup 2/=0.7) by this method has been acquired using high-sensitivity dark field laser-scanning inspection tools. As a result, it is possible to evaluate yield impact properly even with high-sensitivity dark field laser-scanning inspection tools.

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Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)

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