扫描红外显微镜

2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices Pub Date : 2009-07-01 DOI:10.1109/EDM.2009.5174001

D. Karnaushenko, V. G. Polovinkin

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引用次数: 0

摘要

本文介绍了基于ISP SB RAS设计开发的F408红外谱线光谱仪的扫描红外显微镜(SIRM)。设计并实现了自动扫描系统。确定了给定光学系统的光学倍率和空间分辨率。本文还比较了SIRM与F401 InAs矩阵红外显微镜的优缺点。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Scanning infrared microscope

In this paper described scanning infrared microscope (SIRM) based on F408 infrared (IR) line spectrometer designed and developed in the ISP SB RAS. An automatically scanning system has been designed and implemented. Optical magnification and spatial resolution for given optical system has been determined. Advantages and disadvantages of SIRM in compare with F401 InAs matrix infrared microscope are also shown.

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2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices

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