基于单晶PMN-PT的MEMS自适应光学变形镜

Hyunkyu Park, D. Horsley
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引用次数: 4

摘要

提出了一种用于眼科自适应光学的基于mems的单晶PMN-PT变形镜。介绍了DM的制备工艺和表征结果。大行程和高工作带宽保证了DM是一种很有前途的波前校正器。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
MEMS deformable mirrors for adaptive optics using single crystal PMN-PT
A MEMS-based deformable mirror constructed using single-crystal PMN-PT for use in ophthalmologic adaptive optics is presented. The fabrication process and the results of characterization of the DM are described. A large stroke and high operating bandwidth assure that the DM can be a promising wavefront corrector.
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