C. Chellic, D. Cui, S. Hubbard, A. Eisenbach, D. Pavlidis, S. Krawczyk, B. Sermage
{"title":"mocvd生长的C和zn掺杂InGaAs的少数载流子寿命","authors":"C. Chellic, D. Cui, S. Hubbard, A. Eisenbach, D. Pavlidis, S. Krawczyk, B. Sermage","doi":"10.1109/ICIPRM.1999.773651","DOIUrl":null,"url":null,"abstract":"Heavily C-doped p-type InGaAs has been successfully grown by metalorganic chemical vapor deposition using CBr/sub 4/ as a C precursor. A doping concentration as high as 2/spl times/10/sup 19/ cm/sup -3/ has been reached for as-grown (non-annealed) samples. Photoluminescence measurements have been employed to obtain and compare the non-radiative lifetimes in C- and Zn-doped InGaAs. The minority carrier lifetime of as-grown InGaAs:C samples is significantly lower than for as-grown InGaAs:Zn for the same doping concentration. Carrier lifetimes range from 373 ps (p=6.6/spl times/10/sup 16/ cm/sup -3/) to 1.5 ps (p=2.3/spl times/10/sup 19/ cm/sup -3/) in as-grown InGaAs:C, and from 6.8 ns (p=5.0/spl times/10/sup 16/ cm/sup -3/) to 16.8 ps (p=2.1/spl times/10/sup 19/ cm/sup -3/) in InGaAs:Zn, respectively. InGaAs:Zn grown at the same low temperature (450/spl deg/C) as InGaAs:C has a higher minority carrier lifetime. The minority carrier lifetime difference between InGaAs:Zn and InGaAs:C samples is attributed to lower V/III ratio and hydrogen passivation, as well as, lower growth temperatures for the carbon doped InGaAs samples.","PeriodicalId":213868,"journal":{"name":"Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99) (Cat. No.99CH36362)","volume":"102 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"11","resultStr":"{\"title\":\"Minority carrier lifetime in MOCVD-grown C- and Zn-doped InGaAs\",\"authors\":\"C. Chellic, D. Cui, S. Hubbard, A. Eisenbach, D. Pavlidis, S. Krawczyk, B. Sermage\",\"doi\":\"10.1109/ICIPRM.1999.773651\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Heavily C-doped p-type InGaAs has been successfully grown by metalorganic chemical vapor deposition using CBr/sub 4/ as a C precursor. A doping concentration as high as 2/spl times/10/sup 19/ cm/sup -3/ has been reached for as-grown (non-annealed) samples. Photoluminescence measurements have been employed to obtain and compare the non-radiative lifetimes in C- and Zn-doped InGaAs. The minority carrier lifetime of as-grown InGaAs:C samples is significantly lower than for as-grown InGaAs:Zn for the same doping concentration. Carrier lifetimes range from 373 ps (p=6.6/spl times/10/sup 16/ cm/sup -3/) to 1.5 ps (p=2.3/spl times/10/sup 19/ cm/sup -3/) in as-grown InGaAs:C, and from 6.8 ns (p=5.0/spl times/10/sup 16/ cm/sup -3/) to 16.8 ps (p=2.1/spl times/10/sup 19/ cm/sup -3/) in InGaAs:Zn, respectively. InGaAs:Zn grown at the same low temperature (450/spl deg/C) as InGaAs:C has a higher minority carrier lifetime. The minority carrier lifetime difference between InGaAs:Zn and InGaAs:C samples is attributed to lower V/III ratio and hydrogen passivation, as well as, lower growth temperatures for the carbon doped InGaAs samples.\",\"PeriodicalId\":213868,\"journal\":{\"name\":\"Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99) (Cat. No.99CH36362)\",\"volume\":\"102 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-05-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"11\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99) (Cat. No.99CH36362)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICIPRM.1999.773651\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Conference Proceedings. Eleventh International Conference on Indium Phosphide and Related Materials (IPRM'99) (Cat. No.99CH36362)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICIPRM.1999.773651","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Minority carrier lifetime in MOCVD-grown C- and Zn-doped InGaAs
Heavily C-doped p-type InGaAs has been successfully grown by metalorganic chemical vapor deposition using CBr/sub 4/ as a C precursor. A doping concentration as high as 2/spl times/10/sup 19/ cm/sup -3/ has been reached for as-grown (non-annealed) samples. Photoluminescence measurements have been employed to obtain and compare the non-radiative lifetimes in C- and Zn-doped InGaAs. The minority carrier lifetime of as-grown InGaAs:C samples is significantly lower than for as-grown InGaAs:Zn for the same doping concentration. Carrier lifetimes range from 373 ps (p=6.6/spl times/10/sup 16/ cm/sup -3/) to 1.5 ps (p=2.3/spl times/10/sup 19/ cm/sup -3/) in as-grown InGaAs:C, and from 6.8 ns (p=5.0/spl times/10/sup 16/ cm/sup -3/) to 16.8 ps (p=2.1/spl times/10/sup 19/ cm/sup -3/) in InGaAs:Zn, respectively. InGaAs:Zn grown at the same low temperature (450/spl deg/C) as InGaAs:C has a higher minority carrier lifetime. The minority carrier lifetime difference between InGaAs:Zn and InGaAs:C samples is attributed to lower V/III ratio and hydrogen passivation, as well as, lower growth temperatures for the carbon doped InGaAs samples.