dmdgxoi FinFET的亚阈值特性

Md.Shafiul Islam, M. M. Islam, M. Islam
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引用次数: 1

摘要

双栅(DG) mosfet是半导体工业中不可或缺的器件之一。但是,随着尺度的变化,短通道效应(SCEs)对器件在亚纳米环境下的正常工作产生了很大的影响。为了缓解这些问题,本文提出了一种双材料(DM) DG III-Von绝缘体FinFET。这种结构提供了覆盖概念的优点以及在通道中使用化合物半导体材料的优点。通过求解二维泊松方程,建立了器件表面电位和亚阈值电流的数学模型。确保更快的逻辑运算。7Sb在信道中使用。根据表面电位、亚阈值电流、亚阈值摆幅、漏极诱导势垒降低和离子/IOff比对所提出的器件结构的结果进行了评估。结果表明,栅极下搭接长度和栅极金属功函数差对亚阈值电流和表面电位分布的减小有较大影响,从而对器件的ses抑制有较大影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Subthreshold Characteristics of DMDG XOI FinFET
Double gate (DG) MOSFETs are one of the most indispensable devices in semiconductor industry. But, with scaling short-channel effects (SCEs) become very much problematic for the proper operation of the devices in subnanometer regime. To alleviate these SCEs, underlap dual-material (DM) DG III-Von insulator FinFET is proposed here. This structure offers the advantages of an underlap concept along with the merits of using compound semiconductor materials in the channel. Here two-dimensional Poisson's equation is solved to develop the mathematical models of surface potential and subthreshold current of the device. To ensure faster logic operations Ino.3Gao.7Sb is used in the channel. The results of the proposed device structure are evaluated in terms of surface potential, subthreshold current, subthreshold swing, drain-induced barrier lowering, and Ion/IOff ratio. It is observed that, the gate underlap length as well as gate metals work-function difference have strong impact on the reduction of subthreshold current and surface potential profile, and hence on suppression of SCEs of the device.
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