{"title":"扫描电容显微镜的设计","authors":"H. Tanbakuchi, M. Richter, M. Whitener","doi":"10.1109/ARFTG.2006.8361654","DOIUrl":null,"url":null,"abstract":"The design and manufacture of a scanning capacitance microscope (SCM) which is compatible with an atomic force microscope (AFM) for imaging of embedded nanostructure is discussed. The goals of the design are to use commercially available conductive AFM tips, and to incorporate it into an existing AFM system developed system.","PeriodicalId":302468,"journal":{"name":"2006 68th ARFTG Conference: Microwave Measurement","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":"{\"title\":\"Design of scanning capacitance microscope\",\"authors\":\"H. Tanbakuchi, M. Richter, M. Whitener\",\"doi\":\"10.1109/ARFTG.2006.8361654\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The design and manufacture of a scanning capacitance microscope (SCM) which is compatible with an atomic force microscope (AFM) for imaging of embedded nanostructure is discussed. The goals of the design are to use commercially available conductive AFM tips, and to incorporate it into an existing AFM system developed system.\",\"PeriodicalId\":302468,\"journal\":{\"name\":\"2006 68th ARFTG Conference: Microwave Measurement\",\"volume\":\"18 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"7\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 68th ARFTG Conference: Microwave Measurement\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ARFTG.2006.8361654\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 68th ARFTG Conference: Microwave Measurement","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ARFTG.2006.8361654","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The design and manufacture of a scanning capacitance microscope (SCM) which is compatible with an atomic force microscope (AFM) for imaging of embedded nanostructure is discussed. The goals of the design are to use commercially available conductive AFM tips, and to incorporate it into an existing AFM system developed system.
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