使用无介电RF-MEMS变容器的高Q可调谐腔

2009 European Microwave Integrated Circuits Conference (EuMIC) Pub Date : 2009-09-01 DOI:10.23919/eumc.2009.5296111

R. Stefanini, M. Chatras, A. Pothier, J. Orlianges, P. Blondy

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引用次数: 24

摘要

本文介绍了利用RF-MEMS开关变容器实现高Q MEMS可调谐微波腔的初步实验结果。在这项工作中使用的MEMS变容管是基于无介电可调悬臂式致动器，具有良好的可靠性和完善的制造工艺。结果表明，使用这种类型的元件可以获得大的Q，在5 GHz左右的500 MHz调谐范围内，测量到的Qu在550和850之间。

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High Q tunable cavity using dielectric less RF-MEMS varactors

This paper presents first experimental results on high Q MEMS tunable microwave cavity using RF-MEMS switched varactors. MEMS varactors that have been used in this work are based on a dielectric less tunable cantilever actuator, with good reliability and well-established fabrication process. It is shown that one can obtain large Q using type of component, with measured Qu between 550 and 850 for a tuning range of 500 MHz around 5 GHz.

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2009 European Microwave Integrated Circuits Conference (EuMIC)

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