磁控管制造大面积多层光电转换器的方法

2000 10th International Crimean Microwave Conference. "Microwave and Telecommunication Technology". Conference Proceedings (IEEE Cat. No.00EX415) Pub Date : 2000-09-11 DOI:10.1109/CRMICO.2000.1256232

A.S. Masinov

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引用次数: 0

摘要

在磁控溅射法的基础上，研究了制备大面积层状太阳能电池所需的光伏电池的制备和设计方法。提出了一种在单真空周期内以非晶硅为基础制备光电p-i-n结构的方法。

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The magnetron method of producing large area multilayer photo-electric converters

On the basis of the method of magnetron sputtering the ways of obtaining and designing photovoltaic cells for the creation of large area solar cells with a bedded structure have been researched. A method of producing photoelectric p-i-n-structures on the basis of amorphous silicon within a single vacuum cycle is proposed.

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2000 10th International Crimean Microwave Conference. "Microwave and Telecommunication Technology". Conference Proceedings (IEEE Cat. No.00EX415)

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