宽带应用的离子注入w波段单片平衡混频器

T. Trinh, W. Wong, D. Li, J. Kessler
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引用次数: 11

摘要

描述了一种全离子注入的单片宽带平衡混频器,该混频器是在GaAs衬底上制作的,工作在w波段频率。采用深埋n+层来减小二极管串联电阻。将平面共晶AuGe金属化标准合金化成n+层形成欧姆触点。混合器二极管结构完全兼容基于GaAs mesfet的单片集成电路处理技术。在75至88 GHz的射频范围内测量到6.8至10 dB的转换损耗,在92 GHz时LO驱动为10 dBm。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Ion Implanted W-Band Monolithic Balanced Mixers for Broadband Applications
An all ion-implanted monolithic broadband balanced mixer fabricated on a GaAs substrate for operation at W-band frequencies is described. A deep implanted buried n+ layer was used to minimize the diode series resistance. Ohmic contacts were formed by standard alloying of planar eutectic AuGe metallization into the n+ layer. The mixer diode structure is completely compatible with GaAs MESFET-based monolithic integrated circuit processing techniques. A conversion loss from 6.8 to 10 dB has been measured over an RF range of 75 to 88 GHz, with a LO drive of 10 dBm at 92 GHz.
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