用于传感应用的高性能NEMS器件

2015 45th European Solid State Device Research Conference (ESSDERC) Pub Date : 2015-11-12 DOI:10.1109/ESSDERC.2015.7324706

T. Ernst, S. Hentz, J. Arcamone, V. Agache, L. Duraffourg, I. Ouerghi, W. Ludurczak, C. Ladner, E. Ollier, P. Andreucci, É. Colinet, P. Puget

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引用次数: 1

摘要

基于NEMS的传感器为化学分析和生命科学等新兴领域的集成解决方案提供了一些机会。这些器件的关键尺寸在10到100纳米之间，可以在VLSI规模上制造，可能与CMOS共集成，非常适合自主、高灵敏度或密集的传感器。将介绍几个应用，如复杂的气体便携式识别系统，质谱，或生物传感器。

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High performance NEMS devices for sensing applications

NEMS based sensors open several opportunities for integrated solutions in emerging domains as chemical analysis and life science. With critical dimensions ranging between 10 and 100 nm, those devices can be made at the VLSI scale, possibly co-integrated with CMOS and are well suited for autonomous, highly sensitive or dense sensors. Several applications will be presented, as complex gas portable recognitions systems, mass spectrometry, or bio-sensors.

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2015 45th European Solid State Device Research Conference (ESSDERC)

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