光电元件衬底的表面制备技术

2020 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF) Pub Date : 2020-06-01 DOI:10.1109/WECONF48837.2020.9131152

V. Larin

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引用次数: 0

摘要

本文描述了解决与制备用于在ltcc -陶瓷衬底上形成光导的通道表面有关的问题的方法。考虑了具有光学要求的复杂通道表面等离子体化学处理的工艺操作。建立了技术系统的形式化结构和功能模型，以及清洁渠道表面污染过程的数学模型。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Technologies for Surface Preparation of OpticalElectronic Components Substrates

This article describes methods for solving problems related to the problem of preparing channel surfaces for forming light guides on an LTCC-ceramic substrate. Technological operations of plasma chemical treatment for complex preparation of channel surfaces with optical requirements are considered. A formalized structural and functional model of the technological system and a mathematical model of the process of cleaning the surface of channels from contamination are constructed.

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来源期刊

2020 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF)

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