一种低k介电击穿物理定位方法

2012 IEEE International Integrated Reliability Workshop Final Report Pub Date : 2012-10-01 DOI:10.1109/IIRW.2012.6468934

E. Chery, X. Federspiel, G. Beylier, F. Volpi, J. Chaix

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引用次数: 1

摘要

本文报道了一种新的测试结构的结果，该结构可以很容易地定位低k介电击穿点。这个点可以通过使用梳状-蛇形测试结构，并通过监测垫之间的电阻变化来定位。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A method for low-K dielectric breakdown physical localization

This paper reports results obtained on a new test structure developed to easily locate low-k dielectric breakdown spots. This spot can be localized by using a comb-serpentine test structure, and by monitoring the change in resistance between pads.

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2012 IEEE International Integrated Reliability Workshop Final Report

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