纳米al掺杂ZnO薄膜的氧感特性

2014 2nd International Conference on Electronic Design (ICED) Pub Date : 2014-08-01 DOI:10.1109/ICED.2014.7015847

A. Shafura, N. Azhar, I. Saurdi, M. H. Mamat, M. Uzer, M. Rusop

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引用次数: 2

摘要

采用溶胶-凝胶自旋包覆法制备了纳米结构铝掺杂氧化锌(ZnO)，用于制备ZnO基传感器。通过改变室温下的气体流量，研究了其氧传感特性。利用电流-电压(IV)测量、原子力显微镜(AFM)和场发射扫描电镜(FESEM)对薄膜的电学和结构特性进行了研究。在50 sccm的O2流速下，多孔纳米结构的灵敏度为73%。从本研究可知，观察到具有多孔结构的ZnO薄膜可能会提高气敏性能。

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Oxygen-sensing characteristics of nanostructured Al-doped ZnO thin films

Nanostructured Aluminium (Al) doped Zinc Oxide (ZnO) was prepared by sol-gel spin-coating method to fabricate ZnO-based sensors. The oxygen-sensing characteristics were studied by varying the gas flow rate at room temperature. The electrical and structural properties of the films were carried out using current-voltage (IV) measurement, Atomic Force Microscopy (AFM) and Field Emission Scanning Electron Microscopy (FESEM), respectively. The porous nanostructures exhibited good sensitivity, of 73%, in the presence of 50 sccm of O2 flow rate. From this study, it is known that, ZnO thin film that was observed to have porous structure might enhance gas sensing performance.

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2014 2nd International Conference on Electronic Design (ICED)

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