硅热流传感器传热过程的数值模拟

Proceedings of the IEEE - Russia Conference. 1999 High Power Microwave Electronics: Measurements, Identification, Applications. MIA-ME'99 (Cat. No.99EX289) Pub Date : 1999-09-21 DOI:10.1109/MIAME.1999.827844

R.P. Dikareva, V.V. Grinev, E.A. Kuralin, V.A. Cherenko

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引用次数: 0

摘要

本文采用有限元方法对膜式和板式两种硅热流传感器进行了建模。对传感器内部的传热过程进行了数值模拟。

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The numerical simulation of the heat-transfer processes in the silicon heat flow sensor

The authors use finite element analysis to model two types of Si heat flow sensors, i.e. membrane- and plate-type sensors. Numerical simulation of heat transfer processes in the sensors is performed.

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Proceedings of the IEEE - Russia Conference. 1999 High Power Microwave Electronics: Measurements, Identification, Applications. MIA-ME'99 (Cat. No.99EX289)

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