采用树脂粘结钕铁硼微磁体的完全集成电磁执行器

2016 IEEE International Nanoelectronics Conference (INEC) Pub Date : 2016-05-09 DOI:10.1109/INEC.2016.7589368

Kai Tao, Jin Wu, S. Lye, J. Miao, Zhuo-qing Yang, G. Ding, Di Chen

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引用次数: 2

摘要

本文介绍了一种采用树脂粘结钕铁硼微磁体的新型全集成电磁执行器的制备和性能表征。整个结构采用表面微加工技术，在石英衬底上采用层压光刻胶牺牲层工艺形成。由于与MEMS兼容的制造工艺，制造的执行器的体积仅为10 mm3左右，这使其成为迄今为止报道的最小的电磁执行器之一。通过改变输入电流的方向，可以获得约±10 μm的引力和斥力驱动位移。这证明了在MEMS应用中使用聚合物键合磁体的可行性和兼容性。

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Fully integrated electromagnetic actuator using resin-bonded NdFeB micromagnets

This paper presents the fabrication and characterization of a novel fully integrated electromagnetic actuator using resin-bonded NdFeB micromagnets. The whole architecture is formed using the surface micromachining technology with a laminated photoresist sacrificial layer process on quartz substrate. Thanks to the MEMS compatible fabrication process, the volume of the fabricated actuator is only about 10 mm3, which makes it one of the smallest electromagnetic actuators reported to date. By altering the direction of the input current, the actuating displacements of approximately ±10 μm in both attraction and repulsion could be achieved. This serves to demonstrate the viability and compatibility of using polymer-bonded magnets for MEMS applications.

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2016 IEEE International Nanoelectronics Conference (INEC)

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