数字图像指标与产品ADC匹配性能的相关性

IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168) Pub Date : 1998-09-23 DOI:10.1109/ASMC.1998.731407

J. Blais, V. Fischer, Y. Moalem, M. Saunders

{"title":"数字图像指标与产品ADC匹配性能的相关性","authors":"J. Blais, V. Fischer, Y. Moalem, M. Saunders","doi":"10.1109/ASMC.1998.731407","DOIUrl":null,"url":null,"abstract":"Automatic defect classification tool matching requires that consistent quality images are captured on all tools. Image metrics have been developed and the variance of these metrics have been correlated to classifier matching. It is shown that in order to maintain tool matching, image color balance, focus, and shadowing must be monitored and maintained at acceptable values. Of these metrics, inappropriate color balance has the greatest effect on matching.","PeriodicalId":290016,"journal":{"name":"IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168)","volume":"90 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-09-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"Correlation of digital image metrics to production ADC matching performance\",\"authors\":\"J. Blais, V. Fischer, Y. Moalem, M. Saunders\",\"doi\":\"10.1109/ASMC.1998.731407\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Automatic defect classification tool matching requires that consistent quality images are captured on all tools. Image metrics have been developed and the variance of these metrics have been correlated to classifier matching. It is shown that in order to maintain tool matching, image color balance, focus, and shadowing must be monitored and maintained at acceptable values. Of these metrics, inappropriate color balance has the greatest effect on matching.\",\"PeriodicalId\":290016,\"journal\":{\"name\":\"IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168)\",\"volume\":\"90 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-09-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ASMC.1998.731407\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASMC.1998.731407","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 6

摘要

自动缺陷分类工具匹配要求在所有工具上捕获一致质量的图像。已经开发了图像度量，并且这些度量的方差与分类器匹配相关。结果表明，为了保持工具匹配，图像色彩平衡、焦点和阴影必须被监控并保持在可接受的值。在这些指标中，不适当的色彩平衡对匹配的影响最大。

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Correlation of digital image metrics to production ADC matching performance

Automatic defect classification tool matching requires that consistent quality images are captured on all tools. Image metrics have been developed and the variance of these metrics have been correlated to classifier matching. It is shown that in order to maintain tool matching, image color balance, focus, and shadowing must be monitored and maintained at acceptable values. Of these metrics, inappropriate color balance has the greatest effect on matching.

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IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168)

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