高质量碲化铅薄膜生长在硅与缓冲多孔硅层

S. Zimin, M. N. Preobrazhensky, D. Zimin
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引用次数: 0

摘要

研究了在硅衬底上真空沉积PbTe薄膜的结构特性。结果表明,薄膜沿生长方向有取向。电子显微镜和光学显微镜数据显示没有缺陷、孔隙、金属和硫元素微包裹体。采用选择性化学蚀刻和声学显微镜方法检测了晶粒尺寸为20 ~ 60微米的镶嵌结构。通过x射线极位图的研究,发现了晶粒的单晶结构。研究发现,多孔硅表面的厚非晶层改变了PbTe薄膜的生长性质。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
High-quality lead telluride films grown on silicon with buffer porous silicon layers
The structural characteristics of vacuum deposited PbTe films on Si substrate with buffer porous silicon layer were investigated. It was found, that films have orientation along the growth direction. Electron and optical microscopy data have shown the absence of flaws, pores, metal and chalcogen microinclusions. Mosaic structure with a grain size 20-60 micrometers was detected by selective chemical etching and acoustic microscopy methods. Single-crystal structure of grains was shown from the investigations of x-ray pole figures. It was found that thick amorphous layers on a porous silicon surface change the nature of PbTe films growth.
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