MEMS微致动器与传感器的设计与制造

2007 International Conference on Perspective Technologies and Methods in MEMS Design Pub Date : 2007-05-23 DOI:10.1109/MEMSTECH.2007.4283421

I. Puchades, R. Pearson, L. Fuller, S. Gottermeier, S. Lyshevski

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引用次数: 8

摘要

本文报告了采用本体和表面微加工工艺制造的各种微机电系统、器件和结构的结果。这些微机电系统(MEMS)是在罗切斯特理工学院的半导体微加工设备实验室设计和制造的。微致动器和传感器是为概念验证的芯片实验室系统设计和制造的。本文报道了微机电致动器和传感器的测试、评价和特性等实验结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Design and Fabrication of Microactuators and Sensors for MEMS

This paper reports the results for various microelectromechanical systems, devices and structures fabricated using bulk and surface micromachined processes. These microelectromechanical systems (MEMS) are designed and fabricated at the Semiconductor Micro-Fabrication Facility Laboratory at Rochester Institute of Technology. The microactuators and sensors are designed and fabricated for proof-of-concept lab-on-a-chip systems. The experimental results, which include testing, evaluation and characterization of microelectromechanical actuators and sensors, are reported.

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2007 International Conference on Perspective Technologies and Methods in MEMS Design

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