微机械光学传感器

Proceedings IEEE/Cornell Conference on Advanced Concepts in High Speed Semiconductor Devices and Circuits Pub Date : 1995-08-07 DOI:10.1109/CORNEL.1995.482434

A. Tran, D. Haronian, N. Switz, Y. Lo, N. Macdonald

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引用次数: 0

摘要

我们报道了一种表面微机械光学变形传感器的制造和测试。传感元件是一个悬挂镜面，构成法布里-珀罗干涉仪的一部分。在外力作用下，观察到干涉条纹的位移和功率谱密度的变化。该传感器对外部施加的力表现出线性响应，对于对称的双蛇形弹簧几何形状，其谐振频率为15 kHz。

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Micromachined optical sensor

We report the fabrication and testing of a surface micromachined optical deformation sensor. The sensing element is a suspended mirror which forms part of a Fabry-Perot interferometer. In the presence of an external force, shift in interference fringe as well as change in power spectral density was observed. The sensor exhibits linear response to external applied force and has resonant frequency of 15 kHz for a symmetric double serpentine springs geometry.

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Proceedings IEEE/Cornell Conference on Advanced Concepts in High Speed Semiconductor Devices and Circuits

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