中性压力对电子回旋共振放电电离特性的影响

2011 IEEE International Vacuum Electronics Conference (IVEC) Pub Date : 2011-02-21 DOI:10.1109/IVEC.2011.5747033

Xiaolin Jin, Zhonghai Yang, Tao Huang, Xiaofang Zhu, Jianqing Li, Bin Li

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引用次数: 0

摘要

为研究氩电子回旋共振(ECR)放电的电离过程，开发了准三维电磁粒子池加蒙特卡罗碰撞(PIC/MCC)方法的程序。蒙特卡罗技术用于大型带电粒子集合，以确保随机过程的准确表示。近年来的研究主要集中在中性压力对ECR放电特性和ECR等离子体特性的影响。

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Neutral pressure effects on ionization characteristics of electron cyclotron resonance discharge

The code with quasi-three-dimensional electromagnetic particle-in-cell plus Monte Carlo collision (PIC/MCC) method is developed for the research of ionization process of argon electron cyclotron resonance (ECR) discharge. Monte Carlo techniques are used on a large ensemble of charged particles to ensure accurate representation of the stochastic process. Recent work has focused on the effects of neutral pressure on the characteristics of ECR discharge and ECR plasma.

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2011 IEEE International Vacuum Electronics Conference (IVEC)

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