AlN/SiO2/Si压力传感器的权衡问题

2007 International Conference on Perspective Technologies and Methods in MEMS Design Pub Date : 2007-05-23 DOI:10.1109/MEMSTECH.2007.4283449

H. Trang, P. Benech, P. Rey, M. Vaudaine, P. Lemaître-Auger, J. Danel, P. Robert

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引用次数: 4

摘要

介绍了一种新型AIN/SiO2/Si表面声波(SAW)压力传感器的设计、建模和制作过程。给出了自温度补偿结构。重点讨论了各种可能的多层结构，以及压力传感器参数之间的权衡。

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Trade-Off between Issues in AlN/SiO2/Si Pressure Sensor

The design, modeling, fabrication process of a novel AIN/SiO2/Si surface acoustic wave (SAW) pressure sensor are introduced. Self temperature compensation structure is given. Special attention is made on the different possible multilayer structures that could be used, trade-off between parameters of pressure sensor.

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2007 International Conference on Perspective Technologies and Methods in MEMS Design

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