J. Weber, M. Link, R. Primig, D. Pitzer, M. Schreiter
{"title":"高频粘度传感与FBARs","authors":"J. Weber, M. Link, R. Primig, D. Pitzer, M. Schreiter","doi":"10.1109/FREQ.2006.275362","DOIUrl":null,"url":null,"abstract":"Film bulk acoustic resonators operating in thickness shear mode at a frequency of 720 MHz are used to characterize liquids with different viscosities. Their advantage over QCM devices are higher packaging density, CMOS-compatibility as well as lower production costs. Sensor response corresponds with theoretical models in the low viscosity regime but deviates strongly for higher viscosities. This behavior is analyzed as well as an assessment of the FBAR as a viscosity sensor is made","PeriodicalId":445945,"journal":{"name":"2006 IEEE International Frequency Control Symposium and Exposition","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"High Frequency Viscosity Sensing with FBARs\",\"authors\":\"J. Weber, M. Link, R. Primig, D. Pitzer, M. Schreiter\",\"doi\":\"10.1109/FREQ.2006.275362\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Film bulk acoustic resonators operating in thickness shear mode at a frequency of 720 MHz are used to characterize liquids with different viscosities. Their advantage over QCM devices are higher packaging density, CMOS-compatibility as well as lower production costs. Sensor response corresponds with theoretical models in the low viscosity regime but deviates strongly for higher viscosities. This behavior is analyzed as well as an assessment of the FBAR as a viscosity sensor is made\",\"PeriodicalId\":445945,\"journal\":{\"name\":\"2006 IEEE International Frequency Control Symposium and Exposition\",\"volume\":\"15 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-06-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 IEEE International Frequency Control Symposium and Exposition\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/FREQ.2006.275362\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 IEEE International Frequency Control Symposium and Exposition","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/FREQ.2006.275362","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Film bulk acoustic resonators operating in thickness shear mode at a frequency of 720 MHz are used to characterize liquids with different viscosities. Their advantage over QCM devices are higher packaging density, CMOS-compatibility as well as lower production costs. Sensor response corresponds with theoretical models in the low viscosity regime but deviates strongly for higher viscosities. This behavior is analyzed as well as an assessment of the FBAR as a viscosity sensor is made
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
