{"title":"基于AFM的纳米机械臂复杂滞后补偿的离散Preisach模型精确反演","authors":"Zhiyong Sun, N. Xi, Yu Cheng, Sheng Bi, Congjian Li, Liangliang Chen","doi":"10.1109/NANO.2017.8117383","DOIUrl":null,"url":null,"abstract":"Atomic Force microscopy (AFM) is a powerful technology for observing and developing the micro/nano world, which has been bringing tremendous revolution opportunities to various fields. An AFM's maneuverability can be enhanced via modification into a nanorobotic system with its scanning probe working as the end-effector. The probe's spatial precision can easily reach to nanometer level, which is commonly actuated by smart materials, typically the piezoceramics. However, instinctive hysteretic characteristics ubiquitously exist in smart material actuators, which degrade their controllable positioning accuracy, especially for the open-loop cases. As common phenomena, input-output hysteretic relations of integrated AFM systems are generally complicated, caused by actuators' specific characteristics. Since the AFM based nanomanipulation requires slow operations to prevent damage from samples and the sharp probe itself, commonly only hysteresis at low frequency (typically less than 10Hz) need to be reduced. To precisely represent and further reduce generalized hysteretic effects at low frequency, this paper proposes the equivalent representation of the classical Preisach model with analytical inversion. The contributions of this paper are: it is the first time that the exact inversion is established for the Preisach model with generalized discrete representation; furthermore, while maintaining modeling accuracy, the new discrete Preisach model significantly reduces model complexity compared to the traditional Preisach model. Numerical verification was conducted to demonstrate the effectiveness of the proposed discrete Preisach model and its analytical inversion.","PeriodicalId":292399,"journal":{"name":"2017 IEEE 17th International Conference on Nanotechnology (IEEE-NANO)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Exact inversion of discrete Preisach model for compensating complex hysteresis in AFM based nanomanipulator\",\"authors\":\"Zhiyong Sun, N. Xi, Yu Cheng, Sheng Bi, Congjian Li, Liangliang Chen\",\"doi\":\"10.1109/NANO.2017.8117383\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Atomic Force microscopy (AFM) is a powerful technology for observing and developing the micro/nano world, which has been bringing tremendous revolution opportunities to various fields. An AFM's maneuverability can be enhanced via modification into a nanorobotic system with its scanning probe working as the end-effector. The probe's spatial precision can easily reach to nanometer level, which is commonly actuated by smart materials, typically the piezoceramics. However, instinctive hysteretic characteristics ubiquitously exist in smart material actuators, which degrade their controllable positioning accuracy, especially for the open-loop cases. As common phenomena, input-output hysteretic relations of integrated AFM systems are generally complicated, caused by actuators' specific characteristics. Since the AFM based nanomanipulation requires slow operations to prevent damage from samples and the sharp probe itself, commonly only hysteresis at low frequency (typically less than 10Hz) need to be reduced. To precisely represent and further reduce generalized hysteretic effects at low frequency, this paper proposes the equivalent representation of the classical Preisach model with analytical inversion. The contributions of this paper are: it is the first time that the exact inversion is established for the Preisach model with generalized discrete representation; furthermore, while maintaining modeling accuracy, the new discrete Preisach model significantly reduces model complexity compared to the traditional Preisach model. Numerical verification was conducted to demonstrate the effectiveness of the proposed discrete Preisach model and its analytical inversion.\",\"PeriodicalId\":292399,\"journal\":{\"name\":\"2017 IEEE 17th International Conference on Nanotechnology (IEEE-NANO)\",\"volume\":\"5 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 IEEE 17th International Conference on Nanotechnology (IEEE-NANO)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NANO.2017.8117383\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 IEEE 17th International Conference on Nanotechnology (IEEE-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NANO.2017.8117383","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
摘要
原子力显微镜(Atomic Force microscopy, AFM)是一项观察和发展微纳米世界的强大技术,它给各个领域带来了巨大的革命性机遇。通过将扫描探针作为末端执行器改造成纳米机器人系统,可以提高原子力显微镜的可操作性。探针的空间精度可以很容易地达到纳米级,这通常是由智能材料,特别是压电陶瓷驱动的。然而,智能材料执行器普遍存在本能滞后特性,这降低了智能材料执行器的可控定位精度,特别是在开环情况下。作为一种普遍现象,集成AFM系统的输入-输出滞后关系通常是复杂的,这是由执行机构的特定特性引起的。由于基于原子力显微镜的纳米操作需要缓慢的操作以防止样品和尖锐探针本身的损坏,因此通常只需要减少低频(通常小于10Hz)的磁滞。为了准确地表示并进一步减小低频下的广义滞后效应,本文提出了经典Preisach模型的解析反演等效表示。本文的贡献是:首次建立了具有广义离散表示的Preisach模型的精确反演;此外,在保持建模精度的同时,与传统的Preisach模型相比,新的离散Preisach模型显著降低了模型的复杂性。数值验证验证了所提出的离散Preisach模型及其解析反演的有效性。
Exact inversion of discrete Preisach model for compensating complex hysteresis in AFM based nanomanipulator
Atomic Force microscopy (AFM) is a powerful technology for observing and developing the micro/nano world, which has been bringing tremendous revolution opportunities to various fields. An AFM's maneuverability can be enhanced via modification into a nanorobotic system with its scanning probe working as the end-effector. The probe's spatial precision can easily reach to nanometer level, which is commonly actuated by smart materials, typically the piezoceramics. However, instinctive hysteretic characteristics ubiquitously exist in smart material actuators, which degrade their controllable positioning accuracy, especially for the open-loop cases. As common phenomena, input-output hysteretic relations of integrated AFM systems are generally complicated, caused by actuators' specific characteristics. Since the AFM based nanomanipulation requires slow operations to prevent damage from samples and the sharp probe itself, commonly only hysteresis at low frequency (typically less than 10Hz) need to be reduced. To precisely represent and further reduce generalized hysteretic effects at low frequency, this paper proposes the equivalent representation of the classical Preisach model with analytical inversion. The contributions of this paper are: it is the first time that the exact inversion is established for the Preisach model with generalized discrete representation; furthermore, while maintaining modeling accuracy, the new discrete Preisach model significantly reduces model complexity compared to the traditional Preisach model. Numerical verification was conducted to demonstrate the effectiveness of the proposed discrete Preisach model and its analytical inversion.