{"title":"环境湿度对用于电容式MEMS开关的SiNx薄膜表面电导的影响","authors":"D. Birmpiliotis, G. Papaioannou","doi":"10.31399/asm.cp.istfa2022p0337","DOIUrl":null,"url":null,"abstract":"\n The present paper provides an inexpensive method to assess the surface charge density variance directly in capacitive MEMS switches. It was found experimentally that the charge variance decay is directly associated with the presence of ambient humidity, which increases the dielectric film surface conductance. This result is qualitatively confirmed with the aid of interdigitated comb structures, where the same behavior was detected.","PeriodicalId":417175,"journal":{"name":"International Symposium for Testing and Failure Analysis","volume":"9 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"The Impact of Ambient Humidity on the Surface Conductance of SiNx Films for Application in Capacitive MEMS Switches\",\"authors\":\"D. Birmpiliotis, G. Papaioannou\",\"doi\":\"10.31399/asm.cp.istfa2022p0337\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n The present paper provides an inexpensive method to assess the surface charge density variance directly in capacitive MEMS switches. It was found experimentally that the charge variance decay is directly associated with the presence of ambient humidity, which increases the dielectric film surface conductance. This result is qualitatively confirmed with the aid of interdigitated comb structures, where the same behavior was detected.\",\"PeriodicalId\":417175,\"journal\":{\"name\":\"International Symposium for Testing and Failure Analysis\",\"volume\":\"9 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-10-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Symposium for Testing and Failure Analysis\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.31399/asm.cp.istfa2022p0337\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Symposium for Testing and Failure Analysis","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.31399/asm.cp.istfa2022p0337","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The Impact of Ambient Humidity on the Surface Conductance of SiNx Films for Application in Capacitive MEMS Switches
The present paper provides an inexpensive method to assess the surface charge density variance directly in capacitive MEMS switches. It was found experimentally that the charge variance decay is directly associated with the presence of ambient humidity, which increases the dielectric film surface conductance. This result is qualitatively confirmed with the aid of interdigitated comb structures, where the same behavior was detected.