环境湿度对用于电容式MEMS开关的SiNx薄膜表面电导的影响

D. Birmpiliotis, G. Papaioannou
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引用次数: 1

摘要

本文提供了一种廉价的方法来直接评估电容式MEMS开关的表面电荷密度变化。实验发现,电荷方差衰减与环境湿度的存在直接相关,环境湿度增加了介质膜表面电导。这一结果被定性地证实与辅助指间梳结构,其中检测到相同的行为。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The Impact of Ambient Humidity on the Surface Conductance of SiNx Films for Application in Capacitive MEMS Switches
The present paper provides an inexpensive method to assess the surface charge density variance directly in capacitive MEMS switches. It was found experimentally that the charge variance decay is directly associated with the presence of ambient humidity, which increases the dielectric film surface conductance. This result is qualitatively confirmed with the aid of interdigitated comb structures, where the same behavior was detected.
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