问题冒泡上升到顶部

L. Collins
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引用次数: 0

摘要

未来金属互连系统的一个问题是,它们可能太脆弱而不可靠。问题是由于封装和芯片表面之间的热不匹配引起的应力,当两者通过回流焊料凸起相互连接时,就会发生这种不匹配。这种应力会导致表面界面开裂,并可传递到互连堆栈中,导致其他界面开裂,例如保护铜线和介电材料的阻挡层之间。他们的研究使用了有限元分析来推导出介电膜中的电场分布和强度,给定了不同的孔隙大小、形状、介电常数以及不同的孔隙互连。一旦磁场被计算出来,它就被用来驱动电荷流的蒙特卡罗分析。研究表明,当孔隙的介电常数小于其所在基质的介电常数时,孔隙内的电场倾向于增强,从而加速局部电荷载流子的运动。如果孔隙连接在一起,它们可以形成高电场通道,提供促进电介质击穿的传导途径。所以多孔介质有时比非多孔介质是更差的绝缘体。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Problems bubble up to the top
One problem with future metal interconnect systems is that they may be too fragile to be reliable. The problem is the stress caused by thermal mismatch between a package and a chip's surface that occurs when the two are attached to each other by reflowing the solder bumps. This stress can cause cracking at the surface interface and can be transmitted into the interconnect stack, causing cracks at other interfaces, such as between the barrier layers protecting the copper lines and the dielectric material. Their research used finite-element analysis to derive the electric-field distribution and intensity in a dielectric film, given various pore sizes, shapes, and permittivities, and various interconnections of the pores. Once the field had been calculated, it was used to drive a Monte Carlo analysis of charge flow. The work showed that, when the permittivity of a pore is less than that of the matrix it is in, the electric field tends to be enhanced within it, accelerating local charge carriers. If pores join, they can create channels of high electric field that provide a conduction route that promotes dielectric breakdown. So porous dielectrics can sometimes be worse insulators than non-porous ones.
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