基于高K/金属栅极的CMOS放大器与传统栅极堆叠结构的性能比较

M. Swathi, D. Anand, A. Purushothaman, S. Gopalan
{"title":"基于高K/金属栅极的CMOS放大器与传统栅极堆叠结构的性能比较","authors":"M. Swathi, D. Anand, A. Purushothaman, S. Gopalan","doi":"10.1109/ICEES.2018.8443264","DOIUrl":null,"url":null,"abstract":"In accordance with the Moore's law the electronic industry has benefited enormously from MOSFET scaling for the last several decades. The traditional SiO2 has been replaced with high K dielectric such as Hf O2and ZrO2 in order to reduce the tunneling leakage through the gate. Other changes in to the traditional MOS structure introduced in the 45 nm node includes the use of metal gate electrode as opposed to the conventional poly -Silicon and use of strained Silicon in the channel. While the traditional MOS structure has changed since 45nm node(2007), design of circuit is still being done based on the traditional poly-Si/SiO2/Si structure. This paper aims to analyze transistor characteristics with different gate stack combinations including high- K dielectrics, and metal gate and strained Silicon substrate. The result have been compared with that of traditional poly-Si/SiO2/Si structure. Further the performance of a CMOS amplifiers using different gate stack combination has been analyzed. It was found that the transistor characteristics improved significantly when SiO2is replaced with high-K material with or with out metal gate. It was also found that while the power consumption of high- K based amplifier is lower, considerable improvement in gain is achieved.","PeriodicalId":134828,"journal":{"name":"2018 4th International Conference on Electrical Energy Systems (ICEES)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Comparison of High K/Metal Gate Based CMOS Amplifiers Performance with Traditional Gate Stack Structure\",\"authors\":\"M. Swathi, D. Anand, A. Purushothaman, S. Gopalan\",\"doi\":\"10.1109/ICEES.2018.8443264\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In accordance with the Moore's law the electronic industry has benefited enormously from MOSFET scaling for the last several decades. The traditional SiO2 has been replaced with high K dielectric such as Hf O2and ZrO2 in order to reduce the tunneling leakage through the gate. Other changes in to the traditional MOS structure introduced in the 45 nm node includes the use of metal gate electrode as opposed to the conventional poly -Silicon and use of strained Silicon in the channel. While the traditional MOS structure has changed since 45nm node(2007), design of circuit is still being done based on the traditional poly-Si/SiO2/Si structure. This paper aims to analyze transistor characteristics with different gate stack combinations including high- K dielectrics, and metal gate and strained Silicon substrate. The result have been compared with that of traditional poly-Si/SiO2/Si structure. Further the performance of a CMOS amplifiers using different gate stack combination has been analyzed. It was found that the transistor characteristics improved significantly when SiO2is replaced with high-K material with or with out metal gate. It was also found that while the power consumption of high- K based amplifier is lower, considerable improvement in gain is achieved.\",\"PeriodicalId\":134828,\"journal\":{\"name\":\"2018 4th International Conference on Electrical Energy Systems (ICEES)\",\"volume\":\"8 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-02-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 4th International Conference on Electrical Energy Systems (ICEES)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICEES.2018.8443264\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 4th International Conference on Electrical Energy Systems (ICEES)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICEES.2018.8443264","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

摘要

根据摩尔定律,在过去的几十年里,电子工业从MOSFET的缩放中受益匪浅。为了减少通过栅极的隧穿泄漏,传统的SiO2被Hf o2和ZrO2等高K介电介质所取代。在45纳米节点中引入的传统MOS结构的其他变化包括使用金属栅电极而不是传统的多晶硅,以及在沟道中使用应变硅。从45nm节点(2007年)开始,传统的MOS结构发生了变化,但电路的设计仍然基于传统的多晶硅/SiO2/Si结构。本文分析了高介电介质、金属栅极和应变硅衬底等不同栅极叠加组合下晶体管的特性。并与传统的Si/SiO2/Si结构进行了比较。进一步分析了采用不同栅极叠加组合的CMOS放大器的性能。结果表明,用含或不含金属栅极的高钾材料替代sio2后,晶体管的性能得到了显著改善。研究还发现,高K基放大器在功耗较低的同时,获得了相当大的增益改善。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Comparison of High K/Metal Gate Based CMOS Amplifiers Performance with Traditional Gate Stack Structure
In accordance with the Moore's law the electronic industry has benefited enormously from MOSFET scaling for the last several decades. The traditional SiO2 has been replaced with high K dielectric such as Hf O2and ZrO2 in order to reduce the tunneling leakage through the gate. Other changes in to the traditional MOS structure introduced in the 45 nm node includes the use of metal gate electrode as opposed to the conventional poly -Silicon and use of strained Silicon in the channel. While the traditional MOS structure has changed since 45nm node(2007), design of circuit is still being done based on the traditional poly-Si/SiO2/Si structure. This paper aims to analyze transistor characteristics with different gate stack combinations including high- K dielectrics, and metal gate and strained Silicon substrate. The result have been compared with that of traditional poly-Si/SiO2/Si structure. Further the performance of a CMOS amplifiers using different gate stack combination has been analyzed. It was found that the transistor characteristics improved significantly when SiO2is replaced with high-K material with or with out metal gate. It was also found that while the power consumption of high- K based amplifier is lower, considerable improvement in gain is achieved.
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