AlInN/GaN是非常适合高功率高频应用的HEMT器件

C. Gaquière, F. Medjdoub, J. Carlin, S. Vandenbrouck, E. Delos, E. Feltin, N. Grandjean, E. Kohn
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引用次数: 9

摘要

蓝宝石衬底上的alin /GaN非钝化高电子迁移率晶体管(HEMT)在稳态下的最大漏极电流密度接近2 a /mm。由于可以使用超薄势垒层,同时保持极高的载流子密度,因此可以观察到比AlGaN/GaN器件更好的栅极长度缩小。对于一个0.08 mum栅极长度的器件,我们达到了70 GHz的外部电流增益截止频率。大信号测量显示相对较低的射频功率色散。事实上,在10ghz下,我们首次对这种HEMT结构进行了功率测量。我们在低偏置条件下(VDS = 15V)实现了与预期功率一致的1.5 W/mm输出功率密度,尽管由于蓝宝石衬底的强烈热效应,肖特基二极管特性中的大泄漏电流和低缓冲层电阻率。这些结果证明了该结构在极高功率高频应用中的巨大潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
AlInN/GaN a suitable HEMT device for extremely high power high frequency applications
AlInN/GaN unpassivated high electron mobility transistor (HEMT) on sapphire substrate has yielded a maximum drain current density close to 2 A/mm in steady state. Superior gate length downscaling than AlGaN/GaN devices has been observed owing to the possibility of the use of ultra thin barrier layer while keeping extremely high sheet carrier density. We reached an extrinsic current gain cut-off frequency of 70 GHz for a 0.08 mum gate length device. Large signal measurements reveal a relatively low RF power dispersion. Indeed, at 10 GHz we performed for the first time power measurements on such a HEMT structure. We achieved 1.5 W/mm output power density at low bias condition (VDS = 15V) in agreement with the expected power in spite of a strong thermal effect due to the sapphire substrate, a large leakage current in the Schottky diode characteristic and a low buffer layer resistivity. These results demonstrate the great potential of this structure for extremely high power high frequency applications.
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