氮化栅电介质45nm CMOS-SOI工艺的PMOS NBTI分析

K. Geoghegan, J. Siddiqui, Todd R. Weatherford
{"title":"氮化栅电介质45nm CMOS-SOI工艺的PMOS NBTI分析","authors":"K. Geoghegan, J. Siddiqui, Todd R. Weatherford","doi":"10.1109/IIRW.2012.6468955","DOIUrl":null,"url":null,"abstract":"As a consequence of the semiconductor industry chasing Moore's Law, device scaling and changes to the transistor's material system has introduced significant emerging reliability concerns which have the potential for drastically shortening device and hence product lifetimes. Given that semiconductor technologies leveraged for analog and mixed-signal designs in military and aerospace systems tend to lag behind industry, the extent and potential ramifications of the impending reliability problem has yet to be fully appreciated by the respective communities. Radiation effects and extended operating conditions, commonplace in military and aerospace systems, exacerbate the situation. In this paper, the initial results and analysis of the reliability concern of Negative Bias Temperature Instability (NBTI) in p-channel Metal Oxide Semiconductors (PMOS) devices fabricated in a 45nm CMOS-SOI process will be presented. In addition, the prospect of ionizing space-radiation on PMOS NBTI device reliability will be introduced progressing to the topic of further proposed research, PMOS NBTI in an ionizing radiation environment.","PeriodicalId":165120,"journal":{"name":"2012 IEEE International Integrated Reliability Workshop Final Report","volume":"39 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"PMOS NBTI analysis of a 45nm CMOS-SOI process with nitrided gate dielectric\",\"authors\":\"K. Geoghegan, J. Siddiqui, Todd R. Weatherford\",\"doi\":\"10.1109/IIRW.2012.6468955\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"As a consequence of the semiconductor industry chasing Moore's Law, device scaling and changes to the transistor's material system has introduced significant emerging reliability concerns which have the potential for drastically shortening device and hence product lifetimes. Given that semiconductor technologies leveraged for analog and mixed-signal designs in military and aerospace systems tend to lag behind industry, the extent and potential ramifications of the impending reliability problem has yet to be fully appreciated by the respective communities. Radiation effects and extended operating conditions, commonplace in military and aerospace systems, exacerbate the situation. In this paper, the initial results and analysis of the reliability concern of Negative Bias Temperature Instability (NBTI) in p-channel Metal Oxide Semiconductors (PMOS) devices fabricated in a 45nm CMOS-SOI process will be presented. In addition, the prospect of ionizing space-radiation on PMOS NBTI device reliability will be introduced progressing to the topic of further proposed research, PMOS NBTI in an ionizing radiation environment.\",\"PeriodicalId\":165120,\"journal\":{\"name\":\"2012 IEEE International Integrated Reliability Workshop Final Report\",\"volume\":\"39 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 IEEE International Integrated Reliability Workshop Final Report\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IIRW.2012.6468955\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 IEEE International Integrated Reliability Workshop Final Report","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IIRW.2012.6468955","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

摘要

由于半导体行业追逐摩尔定律,器件缩放和晶体管材料系统的变化已经引入了重要的新兴可靠性问题,这些问题有可能大大缩短器件和产品寿命。考虑到军事和航空航天系统中用于模拟和混合信号设计的半导体技术往往落后于工业,迫在眉睫的可靠性问题的程度和潜在后果尚未得到各自社区的充分认识。在军事和航空航天系统中常见的辐射效应和延长的操作条件使情况更加恶化。本文介绍了45纳米CMOS-SOI工艺制备的p沟道金属氧化物半导体(PMOS)器件中负偏置温度不稳定性(NBTI)的可靠性问题的初步结果和分析。此外,还介绍了电离空间辐射对PMOS NBTI器件可靠性的影响,并进一步提出了电离辐射环境下PMOS NBTI器件可靠性的研究课题。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
PMOS NBTI analysis of a 45nm CMOS-SOI process with nitrided gate dielectric
As a consequence of the semiconductor industry chasing Moore's Law, device scaling and changes to the transistor's material system has introduced significant emerging reliability concerns which have the potential for drastically shortening device and hence product lifetimes. Given that semiconductor technologies leveraged for analog and mixed-signal designs in military and aerospace systems tend to lag behind industry, the extent and potential ramifications of the impending reliability problem has yet to be fully appreciated by the respective communities. Radiation effects and extended operating conditions, commonplace in military and aerospace systems, exacerbate the situation. In this paper, the initial results and analysis of the reliability concern of Negative Bias Temperature Instability (NBTI) in p-channel Metal Oxide Semiconductors (PMOS) devices fabricated in a 45nm CMOS-SOI process will be presented. In addition, the prospect of ionizing space-radiation on PMOS NBTI device reliability will be introduced progressing to the topic of further proposed research, PMOS NBTI in an ionizing radiation environment.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信