基于图像的芯片导航

M. Lifshits, E. Rivlin, M. Rudzsky
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引用次数: 3

摘要

在半导体行业,需要最高水平的精度和鲁棒性,机器视觉工具已发展成为指导机器人处理,组装和检查过程的主流自动化工具。本文提出了一种利用预先获取的晶圆图对微眼点图像进行定位的芯片导航算法。它对于在线显微镜来说足够快,并且对制造过程中发生的视觉变化(如对比度变化,重新缩放,旋转和部分特征消除)具有鲁棒性。该算法使用几何哈希,这是一种从物体识别领域中提取的高效技术。实验结果表明,该算法具有较高的可靠性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Image-based navigation on a chip
In semiconductor industry, where highest levels of precision and robustness are required, machine vision tools evolved to become a mainstream automation tools that guide robotic handling, assembly and inspection processes. This paper presents an algorithm for navigation on a chip that is based on localization of microscopic eye-point images using a previously acquired wafer map. It is fast enough for in-line microscopy and robust to visual changes occurring during the manufacturing process, such as contrast variations, re-scaling, rotation and partial feature obliteration. The algorithm uses geometric hashing, a highly efficient technique drawn from the object recognition field. Experimental results indicate high reliability of the algorithm.
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