窄宽度SOI器件的建模:量子力学尺寸量化效应和无意掺杂对器件运行的影响

S.S. Ahmed, D. Vasileska
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引用次数: 0

摘要

传统MOSFET器件的缩放极限促使研究人员寻找新的器件概念,如双栅SOI器件、finfet、聚焦离子束MOSFET等。然而,许多老问题仍然存在,新的问题开始出现。例如,在双栅SOI mosfet和FinFET器件中,量子力学尺寸量化效应显著影响器件的整体性能。此外,无意掺杂会导致器件参数出现相当大的波动,电子-电子相互作用会影响器件漏极载流子的热化。在这项工作中,我们研究了这些相对较新的和具有挑战性的问题对窄宽度SOI器件结构运行的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Modeling of narrow-width SOI devices: the impact of quantum mechanical size quantization effects and unintentional doping on device operation
The ultimate limits in scaling of conventional MOSFET devices have led the researchers to look for novel device concepts such as dual-gate SOI devices, FinFETs, focused ion beam MOSFETs, etc. However, a lot of the old issues still remain and new issues begin to appear. For example, in both dual-gate SOI MOSFETs and in FinFET devices, quantum mechanical size-quantization effects significantly affect the overall device behavior. In addition, unintentional doping leads to considerable fluctuation in the device parameters, and the electron-electron interactions affect the thermalization of the carriers at the drain end of the device. In this work, we investigate the influence of these relatively new and challenging issues on the operation of a narrow-width SOI device structure.
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