{"title":"实际纳米器件电容电压测量方法的探讨","authors":"Li-Lung Lai, Nan Li, Oscar Zhang","doi":"10.1109/CSTIC.2015.7153454","DOIUrl":null,"url":null,"abstract":"Owing to the advancing development of electrical technique in analytical laboratory, we already have capability to measure tiny capacitance, down to 100aF, in Nano-dimension, down to 20nm, of the real-world Nano-device using Nanoprobing in SEM or AFM instead of traditional Micro-probing in OM instrument become real of the claim. The mechanism, operation and application are described and discussed in the content.","PeriodicalId":130108,"journal":{"name":"2015 China Semiconductor Technology International Conference","volume":"22 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-03-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"The approaching of capacitance-voltage measurement toward real-world nano-device\",\"authors\":\"Li-Lung Lai, Nan Li, Oscar Zhang\",\"doi\":\"10.1109/CSTIC.2015.7153454\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Owing to the advancing development of electrical technique in analytical laboratory, we already have capability to measure tiny capacitance, down to 100aF, in Nano-dimension, down to 20nm, of the real-world Nano-device using Nanoprobing in SEM or AFM instead of traditional Micro-probing in OM instrument become real of the claim. The mechanism, operation and application are described and discussed in the content.\",\"PeriodicalId\":130108,\"journal\":{\"name\":\"2015 China Semiconductor Technology International Conference\",\"volume\":\"22 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-03-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 China Semiconductor Technology International Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CSTIC.2015.7153454\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 China Semiconductor Technology International Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CSTIC.2015.7153454","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The approaching of capacitance-voltage measurement toward real-world nano-device
Owing to the advancing development of electrical technique in analytical laboratory, we already have capability to measure tiny capacitance, down to 100aF, in Nano-dimension, down to 20nm, of the real-world Nano-device using Nanoprobing in SEM or AFM instead of traditional Micro-probing in OM instrument become real of the claim. The mechanism, operation and application are described and discussed in the content.
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