混凝土中氯离子浓度微传感器的研制

IEEE Sensors, 2005. Pub Date : 2005-10-31 DOI:10.1109/ICSENS.2005.1597669

F. Cao, D. Greve, I. Oppenheim

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引用次数: 5

摘要

氯化物渗入混凝土结构会导致钢筋锈蚀并最终破坏。在这里，我们报告了一种三电极电化学传感器，适用于监测混凝土中的氯化物浓度。我们使用伏安法来表征传感器在KCl和NaClO溶液中的稳定性和灵敏度。我们还概述了集成微传感器的制造过程，并演示了在CMOS芯片上形成电极的关键工艺步骤

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Development of microsensors for chloride concentration in concrete

Chloride infiltration into concrete structures causes corrosion of steel reinforcing rods and eventual failure. Here we report on a three-electrode electrochemical sensor suitable for monitoring chloride concentrations in concrete. We use voltammetry to characterize the sensor for stability and sensitivity in KCl and NaClO solutions. We also outline a process for fabrication of an integrated microsensor and demonstrate crucial process steps for the formation of electrodes on a CMOS chip

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IEEE Sensors, 2005.

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