{"title":"激光超声法表征基底上透明薄膜的弹性常数","authors":"Zhe Li, Di Ma, Shu-Yi Zhang, K. Wasa, X. Shui","doi":"10.1109/SPAWDA.2008.4775807","DOIUrl":null,"url":null,"abstract":"A laser generation and optical difference detection method of surface acoustic waves is used for characterizing elastic constants of thin films deposited on substrates. The film/substrate samples are prepared by a RF magnetron sputtering technique. Teflon-like films, deposited on three kinds of substrates, silicone plates, glass and copper plates, have been studied and the related parameters have been evaluated.","PeriodicalId":190941,"journal":{"name":"2008 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Characterizations of elastic constants of transparent thin films deposited on substrates by laser ultrasonic method\",\"authors\":\"Zhe Li, Di Ma, Shu-Yi Zhang, K. Wasa, X. Shui\",\"doi\":\"10.1109/SPAWDA.2008.4775807\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A laser generation and optical difference detection method of surface acoustic waves is used for characterizing elastic constants of thin films deposited on substrates. The film/substrate samples are prepared by a RF magnetron sputtering technique. Teflon-like films, deposited on three kinds of substrates, silicone plates, glass and copper plates, have been studied and the related parameters have been evaluated.\",\"PeriodicalId\":190941,\"journal\":{\"name\":\"2008 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications\",\"volume\":\"3 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SPAWDA.2008.4775807\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SPAWDA.2008.4775807","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Characterizations of elastic constants of transparent thin films deposited on substrates by laser ultrasonic method
A laser generation and optical difference detection method of surface acoustic waves is used for characterizing elastic constants of thin films deposited on substrates. The film/substrate samples are prepared by a RF magnetron sputtering technique. Teflon-like films, deposited on three kinds of substrates, silicone plates, glass and copper plates, have been studied and the related parameters have been evaluated.
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