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微机械陀螺仪工作元件设计算法的建立

2008 International Conference on Perspective Technologies and Methods in MEMS Design Pub Date : 2008-05-21 DOI:10.1109/MEMSTECH.2008.4558734
M. Lobur, A. Holovatyy
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摘要

本文提出了微机械陀螺仪振动的数学模型及其工作元件构造参数的设计算法。
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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Creation of design algorithm of working elements of micromechanical gyroscopes
In this paper, the mathematical model of vibrations of the micromechanical gyroscope and the design algorithm of the constructive parameters of its working elements are proposed.
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2008 International Conference on Perspective Technologies and Methods in MEMS Design
2008 International Conference on Perspective Technologies and Methods in MEMS Design
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