Biosensing Performance Optimization of DMFET for Fully Filled and Partially Filled Cavity

In this paper, a p-channel Dielectric Modulated Field Effect Transistor (DMFET) used as a biosensor has been investigated for the detection of the neutral as well as charged biomolecules. To analyze the detection ability and sensitivity of the device various metrics such as electric field, surface potential, drain current and transconductance are investigated under different bias conditions. For the detection of biomolecules in the cavity, change in threshold voltage is used as sensing parameter. The device shows a threshold voltage shift of 360 mV for K=5. The device sensitivity is observed at different dielectrics and it is found that drain current sensitivity increases with the increasing value of the dielectric constants. The transconductance of the device increases by a value of 6 × 10^-5 A/V for a biosample with K=5 in the cavity. The fabrication process flow of the device has also been proposed to the minimum involvement of complex processes. Further, performance metrics are analyzed at the partially filled cavity and fully filled cavity to observe the effectiveness of this device in the detection of the neutral and charged biomolecules