{"title":"用限流场静电喷涂技术制备铜纳米线、纳米粒子和薄膜","authors":"P. Heil, W. Gu, Sangho Lim, Hyungsoo Choi, K. Kim","doi":"10.1109/NMDC.2006.4388828","DOIUrl":null,"url":null,"abstract":"Nanoscale structures of copper including nanowires, nanoparticles, and thin films were produced using flow-limited field-injection electrostatic spraying (FFESS) combined with chemical vapor deposition (CVD). The FFESS system allowed for efficient vaporization and delivery of the CVD precursor. The system also allowed for control of the type of structures based on deposition parameters. X-ray photoelectron spectroscopy (XPS) data confirmed that the samples were pure copper.","PeriodicalId":200163,"journal":{"name":"2006 IEEE Nanotechnology Materials and Devices Conference","volume":"49 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Generation and characterization of copper nanowires, nanoparticles, and thin films by flow- limited field-injection electrostatic spraying\",\"authors\":\"P. Heil, W. Gu, Sangho Lim, Hyungsoo Choi, K. Kim\",\"doi\":\"10.1109/NMDC.2006.4388828\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Nanoscale structures of copper including nanowires, nanoparticles, and thin films were produced using flow-limited field-injection electrostatic spraying (FFESS) combined with chemical vapor deposition (CVD). The FFESS system allowed for efficient vaporization and delivery of the CVD precursor. The system also allowed for control of the type of structures based on deposition parameters. X-ray photoelectron spectroscopy (XPS) data confirmed that the samples were pure copper.\",\"PeriodicalId\":200163,\"journal\":{\"name\":\"2006 IEEE Nanotechnology Materials and Devices Conference\",\"volume\":\"49 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 IEEE Nanotechnology Materials and Devices Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NMDC.2006.4388828\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 IEEE Nanotechnology Materials and Devices Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NMDC.2006.4388828","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Generation and characterization of copper nanowires, nanoparticles, and thin films by flow- limited field-injection electrostatic spraying
Nanoscale structures of copper including nanowires, nanoparticles, and thin films were produced using flow-limited field-injection electrostatic spraying (FFESS) combined with chemical vapor deposition (CVD). The FFESS system allowed for efficient vaporization and delivery of the CVD precursor. The system also allowed for control of the type of structures based on deposition parameters. X-ray photoelectron spectroscopy (XPS) data confirmed that the samples were pure copper.
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