F. Perdigones, A. Luque, A. Gañán-Calvo, J. Esteve, J. Monserrat, J. Quero
{"title":"硅基微滴复合生产的微系统研究","authors":"F. Perdigones, A. Luque, A. Gañán-Calvo, J. Esteve, J. Monserrat, J. Quero","doi":"10.1109/SCED.2007.384034","DOIUrl":null,"url":null,"abstract":"In this paper, the development of a microsystem of multiple production of micro-drops manufactured on silicon is reported. The technology used to generate the micro-drops is flow focusing. Therefore, the aim is the integration of flow focusing technology on silicon for mass production of microparticles, in this case, micro-drops. All the alternative fabrication processes on silicon, with their advantages and disadvantages not only about fabrication, but also flow focusing operation, are explained. The behaviors of the device obtained by simulations are displayed. The results of simulations show stable and unstable behaviors. The instabilities are due to fluidic interactions. From these simulation some solutions are proposed in order to solve the instability, and therefore, to improve the range of operation of the device.","PeriodicalId":108254,"journal":{"name":"2007 Spanish Conference on Electron Devices","volume":"21 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-07-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Towards a Microsytem of Multiple Production of Micro-Drops Manufactured on Silicon\",\"authors\":\"F. Perdigones, A. Luque, A. Gañán-Calvo, J. Esteve, J. Monserrat, J. Quero\",\"doi\":\"10.1109/SCED.2007.384034\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, the development of a microsystem of multiple production of micro-drops manufactured on silicon is reported. The technology used to generate the micro-drops is flow focusing. Therefore, the aim is the integration of flow focusing technology on silicon for mass production of microparticles, in this case, micro-drops. All the alternative fabrication processes on silicon, with their advantages and disadvantages not only about fabrication, but also flow focusing operation, are explained. The behaviors of the device obtained by simulations are displayed. The results of simulations show stable and unstable behaviors. The instabilities are due to fluidic interactions. From these simulation some solutions are proposed in order to solve the instability, and therefore, to improve the range of operation of the device.\",\"PeriodicalId\":108254,\"journal\":{\"name\":\"2007 Spanish Conference on Electron Devices\",\"volume\":\"21 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-07-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 Spanish Conference on Electron Devices\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SCED.2007.384034\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 Spanish Conference on Electron Devices","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SCED.2007.384034","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Towards a Microsytem of Multiple Production of Micro-Drops Manufactured on Silicon
In this paper, the development of a microsystem of multiple production of micro-drops manufactured on silicon is reported. The technology used to generate the micro-drops is flow focusing. Therefore, the aim is the integration of flow focusing technology on silicon for mass production of microparticles, in this case, micro-drops. All the alternative fabrication processes on silicon, with their advantages and disadvantages not only about fabrication, but also flow focusing operation, are explained. The behaviors of the device obtained by simulations are displayed. The results of simulations show stable and unstable behaviors. The instabilities are due to fluidic interactions. From these simulation some solutions are proposed in order to solve the instability, and therefore, to improve the range of operation of the device.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
