J. Spannhake, O. Schulz, A. Helwig, G. Miiller, T. Doll
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Design, development and operational concept of an advanced MEMS IR source for miniaturized gas sensor systems
Miniaturized non-dispersive infrared (NDIR) gas sensing systems require as key components bright thermal infrared (IR) sources that can be modulated at reasonably high speed to allow high-sensitivity lock-in detection to be applied. In addition such sources should provide a stable emission naffected by both short-term environmental changes as well as long-term drift. As miniaturized light bulbs, widely used in commercial NDIR gas sensing systems, cannot fulfil these requirements we have developed miniaturized thermal IR emitters with built-in monitoring and self-test features
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