基于功函数工程的l型介质TFET设计及漏极电流特性

Naga Swathi Tallapaneni, Megala Venkatesan
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引用次数: 0

摘要

利用TCAD工具对隧道场效应晶体管(ttfet)进行了内部修改,在5nm技术中使用两种不同的介电材料进行了新颖的l形。该装置由高钾介电材料为氧化铪(Hf02)和低钾介电材料为二氧化硅(SiO2)制成。这两种材料都具有良好的高电位,可以吸引低功率,并以较低的漏电流(Ioff)实现良好的接通电流(Ion)。基于对该器件的分析和在ATLAS模拟器上的仿真,所提出的器件(L-DTFET)表现出带间隧道效应(BTBT)。L-DTFET的源极和漏极掺杂浓度相等。,但通道掺杂浓度较少。由于通道掺杂浓度高。BTBT机制优于双栅TFET和传统TFET。l型DTFET表现出改进的电气特性,并对所有参数进行了校准。由于在L型介质TFET的通道中掺杂了口袋,抑制了拐角效应。l - dtfet的关键特性是在不降低导通电流(Ion)或提高漏电流的情况下将栅极长度缩放到5nm。因此。, 5nm l型DTFET的能量效率证明了低功耗高速应用的正确性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Design and Drain Current Characteristics of L-Shaped Dielectric TFET with work function Engineering
The Tunnel Field Effect Transistor (TFET) is modified internally with a novel L-shaped with two different dielectric materials in 5nm technology using the TCAD tool. The proposed device is made of High k dielectric materials being Hafnium Oxide (Hf02) and low k dielectric materials being Silicon Dioxide (SiO2). Both materials have a good high potential to attract low power and achieve well on current (Ion) with lower leakage current (Ioff). Based on its analysis and simulations using the ATLAS simulator, the suggested device (L-DTFET) exhibits band to band tunnelling (BTBT). Source and drain doping concentration are equal in the Proposed L-DTFET., but channel doping concentration is less. Due to channel doping concentration., the BTBT mechanism is good over the Double Gate TFET and Conventional TFET. The L-shaped DTFET exhibits improved electrical characteristics and are calibrated for all the parameters. The corner effect is suppressed due to pocket doping in the channel of L- shaped dielectric TFET. The key properties of L-DTFETs are scaling the gate length to a 5 nm invention without reducing the on current (Ion) or raising the leakage current. Therefore., the energy efficiency of 5nm L-shaped DTFET justifies low power high-speed applications.
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