不同栅极材料对硅基MOSFET性能的影响

Al Mamun Mizan, Syeda Fahima Nazreen, Saqlain Ashraf, A. Z. M. Tahmidul Kabir, John Maxwell Gomes, Sristy Karmoker, Nazmus Sakib Nabil, Md. Kabiruzzaman
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引用次数: 0

摘要

本文用不同的栅极氧化物对硅基MOSFET进行了研究,以了解哪种氧化物的效果最好。本研究采用氧化硅(SiO2)、氧化镓(Ga2O3)和氧化铝(Al2O3)作为栅极材料,观察MOSFET的灵敏度、阈值电压和漏极电流。与其他两种材料相比,Al2O3栅极材料提供了最高的终端电流和更快的MOSFET导通电压(0.7 V)。Al2O3提供最佳性能;因此,它可能是一种很有前途的栅极层材料。此外,还比较了这些栅极氧化物的电子和空穴浓度以及电势。本文使用COMSOL Multiphysics®软件对所得结果进行了模拟。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Study of Different Gate Materials on Performance of Si Based MOSFET
In this paper, Silicon-based MOSFET has been investigated with different gate oxides for knowing which oxide shows the best result. Silicon-di oxide (SiO2), gallium oxide (Ga2O3), and aluminum oxide (Al2O3) have been used as gate materials for observing the sensitivity, threshold voltage, and drain current of the MOSFET in this study. Al2O3 gate material gives the highest terminal current and faster turn-on voltage (0.7 V) of the MOSFET compared to the other two. Al2O3 delivers the best performance; and hence, it could be a promising material for the gate layer. In addition, electron and hole concentrations of those gate oxides and electric potential have been compared. In this paper, COMSOL Multiphysics® software has been used to simulate the obtained results.
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