{"title":"扫描电子显微镜中扫描透射电子显微镜的概述","authors":"Jason Holm","doi":"10.31399/asm.edfa.2021-4.p018","DOIUrl":null,"url":null,"abstract":"\n This article provides a brief overview of STEM-in-SEM, discussing the pros and cons, recent advancements in detector technology, and the emergence of 4D STEM-in-SEM, a relatively new method that uses diffraction patterns recorded at different raster positions to enhance images offline in selected regions of interest.","PeriodicalId":431761,"journal":{"name":"EDFA Technical Articles","volume":"7 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A Brief Overview of Scanning Transmission Electron Microscopy in a Scanning Electron Microscope\",\"authors\":\"Jason Holm\",\"doi\":\"10.31399/asm.edfa.2021-4.p018\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n This article provides a brief overview of STEM-in-SEM, discussing the pros and cons, recent advancements in detector technology, and the emergence of 4D STEM-in-SEM, a relatively new method that uses diffraction patterns recorded at different raster positions to enhance images offline in selected regions of interest.\",\"PeriodicalId\":431761,\"journal\":{\"name\":\"EDFA Technical Articles\",\"volume\":\"7 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"EDFA Technical Articles\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.31399/asm.edfa.2021-4.p018\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"EDFA Technical Articles","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.31399/asm.edfa.2021-4.p018","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A Brief Overview of Scanning Transmission Electron Microscopy in a Scanning Electron Microscope
This article provides a brief overview of STEM-in-SEM, discussing the pros and cons, recent advancements in detector technology, and the emergence of 4D STEM-in-SEM, a relatively new method that uses diffraction patterns recorded at different raster positions to enhance images offline in selected regions of interest.
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