由于模具附着过程造成的模具制造应力

P. Tsao, Arkady S. Voloshin
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引用次数: 6

摘要

由不同材料组成的电子封装的制造,由于热膨胀系数的不匹配导致了残余应力的发展。因此,要正确评估包装的使用寿命,必须考虑到这些应力。采用数字图像分析增强云纹干涉法(DIAEMI)测量了由于模具贴附过程引起的模具的原位面外位移。这一信息与模具中的残余应力有关。制备了几种有涂层和没有涂层的测试模具,并使用“低应力”和“高应力”两种不同的粘合材料对诱导应力进行了分析。观察并记录了模具的初始和最终(附模后)表面轮廓图案。采用混合有限元法计算了模具的面外位移和诱导应力。结果表明,高应力结合材料在模具内引起的应力平均比低应力结合材料引起的应力高5倍。在模附过程中,薄片涂层引起的残余应力得到了释放。所得结果与直接有限元法预测结果进行了比较。结果表明,直接有限元法预测的应力值远高于混合有限元法计算的应力值。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Manufacturing stresses in die due to die attach process
Manufacturing of the electronic packages consisting of different materials leads to the development of the residual stresses due to mismatch in the coefficients of thermal expansion. Thus, to properly assess service life of the packages, those stresses must be taken into account. An experimental technique, the digital image analysis enhanced moire interferometry ( DIAEMI), was used to measure the in-situ out-of-plane displacements of the die due to the die-attach process. This information was related to the residual stresses in the die. Several test dies, with and without coating, were prepared and two different bonding materials, "low-stress" and "high-stress", were used for analysis of the induced stresses. The initial and final (after die-attach) surface contour patterns of the dies were observed and recorded. Out-of-plane displacements of the dies were obtained and induced stresses were calculated by a hybrid finite element method. The results show that stresses in die induced by high-stress bonding material are on average five times higher than the stresses induced by low-stress material. It was also found that during die-attach some of residual stresses induced by chip's coating were released. The obtained results were compared with the straight forward finite element method prediction. It shows that the stresses predicted by the straight forward finite element analysis are much higher than the stresses obtained by the hybrid method.<>
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