用于外腔激光器和微光谱仪的高效率MEMS可调谐光栅

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI:10.1109/OMEMS.2008.4607814

R. Lockhart, M. Tormen, P. Niedermann, T. Overstolz, A. Hoogerwerf, R. Stanley

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引用次数: 10

摘要

第二代MEMS可调谐燃烧光栅的光学特性具有1倍1 mm的有源面积，显示出高效的波长滤波，反射输出>90%，近红外(NIR)调谐超过25 nm。

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High-efficiency MEMS tuneable gratings for external cavity lasers and microspectrometers

Optical characterization of a second generation MEMS tuneable blazed grating with a 1times1 mm active area has demonstrated high-efficiency wavelength filtering with reflected outputs >90% and tuning over 25 nm in the near-infrared (NIR).

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2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

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